Display

Sticky Chuck

Stick Chuck(점착척)이란?

Sticky Module/ASM01

(부분흡착 방식, ∅50~70mm)

Sticky Body/ASB01

(전면흡착 방식, 50~300mm)

Specifications

Size
- Sticky Module: ∅30~70mm
- Sticky Body: 200 X 200mm
Flatness & Parallelism
- Sticky Module: ±15µm
- Sticky Body: ±25µm
Drive Unit
- Air or N₂ Blower Line
- Desorption Module or Push Pin
Chucking Force: 4g/cm²

Features

점착력이 있는 Material을 사용하여 기판을 흡착 유지하는 장치
소모품으로 일정시간 사용 후 간단히 교체할 수 있는 Type
사용 환경에 따라 영향받지 않음 (ex. 대기 또는 진공상태)
기판 탈착 시 Desorption Module 사용 (Air or N₂ Blower 사용)

Display

Sticky Chuck

What is Sticky Chuck?

Sticky Module/ASM01

(partial adsorption type, ∅50~70mm)

Sticky Body/ASB01

(full adsorption type, 50~300mm)

Specifications

Size
- Sticky Module: ∅30~70mm
- Sticky Body: 200 X 200mm
Flatness & Parallelism
- Sticky Module: ±15µm
- Sticky Body: ±25µm
Drive Unit
- Air or N₂ Blower Line
- Desorption Module or Push Pin
Chucking Force: 4g/cm²

Features

Device that adsorbs and holds substrates by using a sticky material
Consumables easily replaced after a certain period of use
Not affected by usage environment (e.g. still air condition or vacuum condition)
Desorption Module used for substrate desorption (Air or N₂ Blower)

Display

Sticky Chuck

Sticky Chuck（粘着チャック）とは？

Sticky Module/ASM01

(部分吸着方式、∅50〜70mm)

Sticky Body/ASB01

(全面吸着方式、50〜300mm)

Specifications

Size
- Sticky Module: ∅30~70mm
- Sticky Body: 200 X 200mm
Flatness & Parallelism
- Sticky Module: ±15µm
- Sticky Body: ±25µm
Drive Unit
- Air or N₂ Blower Line
- Desorption Module or Push Pin
Chucking Force: 4g/cm²

Features

吸着力のある素材を使用し、基板を吸着・保持する装置
消耗品であり、一定時間使用した後に簡単に交換できるタイプ
使用環境による影響を受けない（ex．待機または真空状態）
基板脱着時にDesorption Moduleを使用 (Air or N₂ Blower)

Display

Sticky Chuck

什么是Sticky Chuck(黏着吸盘)？

Sticky Module/ASM01

(部分吸着方式, ∅50~70mm)

Sticky Body/ASB01

(全面吸着方式, 50~300mm)

Specifications

Size
- Sticky Module: ∅30~70mm
- Sticky Body: 200 X 200mm
Flatness & Parallelism
- Sticky Module: ±15µm
- Sticky Body: ±25µm
Drive Unit
- Air or N₂ Blower Line
- Desorption Module or Push Pin
Chucking Force: 4g/cm²

Features

使用有黏着力的Material，维持基板吸着的装置
作为消耗品使用一定时间后，能够简易交替的Type
不受环境不同而有所影响(ex. 大气或真空状态)
基盘脱着时使用Desorption Module (使用Air or N₂ Blower)