E.S.C.
(94mm X 52mm X 10T)
E.S.C.
(179mm X 80mm X 10T)
E.S.C.
(90mm X 89mm X 10T)
E.S.C.
(200mm X 100mm X 10T)
E.S.C.
(98mm X 182mm X 10T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force
E.S.C.
(94mm X 52mm X 10T)
E.S.C.
(179mm X 80mm X 10T)
E.S.C.
(90mm X 89mm X 10T)
E.S.C.
(200mm X 100mm X 10T)
E.S.C.
(98mm X 182mm X 10T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force
E.S.C.
(94mm X 52mm X 10T)
E.S.C.
(179mm X 80mm X 10T)
E.S.C.
(90mm X 89mm X 10T)
E.S.C.
(200mm X 100mm X 10T)
E.S.C.
(98mm X 182mm X 10T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force
E.S.C.
(94mm X 52mm X 10T)
E.S.C.
(179mm X 80mm X 10T)
E.S.C.
(90mm X 89mm X 10T)
E.S.C.
(200mm X 100mm X 10T)
E.S.C.
(98mm X 182mm X 10T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force