Other E.S.C.

Wafer Handler

(∅300mm X 5T)

Heater E.S.C.

(Ceramic Sheet + Metal Base)

Heater E.S.C.

(Ceramic Sheet + Ceramic Base)

Specifications

  • Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
  • Voltage(DC): ≤ ±5kV
  • Drive Unit
    • Power Supply
    • Power Cable
  • Chucking Force: 2g/cm2

Inspections

  • Appearance
  • Flatness(AL+BODY): ≤ ±10µm
  • Minimum Voltage
  • Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
  • Auto Run: Recipe Test under Working Conditions
  • Chucking Force