Chip Handler
(272mm X 170mm X 15T)
Wafer Handler
(∅300mm X 5T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Power Supply
- Power Cable
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force