Display

E.S.C. for LCD

E.S.C.(정전척)란?

4G E.S.C.

(312mm X 557.5mm X 15T)

5G E.S.C.

(312mm X 558.5mm X 15T)

6G E.S.C.

(370mm X 502mm X 15T)

7G E.S.C.

(375mm X 489mm X 15T)

8G E.S.C.

(366mm X 626mm X 15T)

Specifications

Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
Voltage(DC): ≤ ±5kV
Drive Unit
- Power Supply
- Power Cable
Chucking Force: 2g/cm²

Inspections

Appearance
Flatness(AL+BODY): ≤ ±10µm
Minimum Voltage
Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
Auto Run: Recipe Test under Working Conditions
Chucking Force

Display

E.S.C. for LCD

What is E.S.C.?

4G E.S.C.

(312mm X 557.5mm X 15T)

5G E.S.C.

(312mm X 558.5mm X 15T)

6G E.S.C.

(370mm X 502mm X 15T)

7G E.S.C.

(375mm X 489mm X 15T)

8G E.S.C.

(366mm X 626mm X 15T)

Specifications

Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
Voltage(DC): ≤ ±5kV
Drive Unit
- Power Supply
- Power Cable
Chucking Force: 2g/cm²

Inspections

Appearance
Flatness(AL+BODY): ≤ ±10µm
Minimum Voltage
Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
Auto Run: Recipe Test under Working Conditions
Chucking Force

Display

E.S.C. for LCD

E.S.C.（静電チャック）とは？

4G E.S.C.

(312mm X 557.5mm X 15T)

5G E.S.C.

(312mm X 558.5mm X 15T)

6G E.S.C.

(370mm X 502mm X 15T)

7G E.S.C.

(375mm X 489mm X 15T)

8G E.S.C.

(366mm X 626mm X 15T)

Specifications

Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
Voltage(DC): ≤ ±5kV
Drive Unit
- Power Supply
- Power Cable
Chucking Force: 2g/cm²

Inspections

Appearance
Flatness(AL+BODY): ≤ ±10µm
Minimum Voltage
Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
Auto Run: Recipe Test under Working Conditions
Chucking Force

Display

E.S.C. for LCD

什么是E.S.C. (静电吸盘)？

4G E.S.C.

(312mm X 557.5mm X 15T)

5G E.S.C.

(312mm X 558.5mm X 15T)

6G E.S.C.

(370mm X 502mm X 15T)

7G E.S.C.

(375mm X 489mm X 15T)

8G E.S.C.

(366mm X 626mm X 15T)

Specifications

Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
Voltage(DC): ≤ ±5kV
Drive Unit
- Power Supply
- Power Cable
Chucking Force: 2g/cm²

Inspections

Appearance
Flatness(AL+BODY): ≤ ±10µm
Minimum Voltage
Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
Auto Run: Recipe Test under Working Conditions
Chucking Force