E.S.C. for LCD

E.S.C.(정전척)란?

4G E.S.C.

(312mm X 557.5mm X 15T)

5G E.S.C.

(312mm X 558.5mm X 15T)

6G E.S.C.

(370mm X 502mm X 15T)

7G E.S.C.

(375mm X 489mm X 15T)

8G E.S.C.

(366mm X 626mm X 15T)

Specifications

  • Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
  • Voltage(DC): ≤ ±5kV
  • Drive Unit
    • Power Supply
    • Power Cable
  • Chucking Force: 2g/cm2

Inspections

  • Appearance
  • Flatness(AL+BODY): ≤ ±10µm
  • Minimum Voltage
  • Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
  • Auto Run: Recipe Test under Working Conditions
  • Chucking Force