
4G E.S.C.
(312mm X 557.5mm X 15T)

5G E.S.C.
(312mm X 558.5mm X 15T)

6G E.S.C.
(370mm X 502mm X 15T)

7G E.S.C.
(375mm X 489mm X 15T)

8G E.S.C.
(366mm X 626mm X 15T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force

4G E.S.C.
(312mm X 557.5mm X 15T)

5G E.S.C.
(312mm X 558.5mm X 15T)

6G E.S.C.
(370mm X 502mm X 15T)

7G E.S.C.
(375mm X 489mm X 15T)

8G E.S.C.
(366mm X 626mm X 15T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force

4G E.S.C.
(312mm X 557.5mm X 15T)

5G E.S.C.
(312mm X 558.5mm X 15T)

6G E.S.C.
(370mm X 502mm X 15T)

7G E.S.C.
(375mm X 489mm X 15T)

8G E.S.C.
(366mm X 626mm X 15T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force

4G E.S.C.
(312mm X 557.5mm X 15T)

5G E.S.C.
(312mm X 558.5mm X 15T)

6G E.S.C.
(370mm X 502mm X 15T)

7G E.S.C.
(375mm X 489mm X 15T)

8G E.S.C.
(366mm X 626mm X 15T)
Specifications
- Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T)
- Voltage(DC): ≤ ±5kV
- Drive Unit
- Chucking Force: 2g/cm2
Inspections
- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force